1-6 September 2019
Lanzhou
Asia/Shanghai timezone
The deadline for the ICIS 2019 manuscript submission is extended to September 30. All oral presentations have been uploaded on the page of 'timetable'.

Capabilities of radio-frequency ion-sources in surface modification of materials

6 Sep 2019, 09:30
20m
Lanzhou

Lanzhou

No. 1 Beibinhe East Road, Chengguan District, Lanzhou
Contributed oral

Speaker

Dr Martin Becker (Institute of Experimental Physics, Heinrich-Buff-Ring 16, Justus Liebig University Giessen, D-35392 Giessen, Germany)

Description

The capabilities of ion-beam techniques for thin-film processing, i.e., for materials deposition by ion-beam sputtering and surface treatment, are reviewed. The basic interaction mechanisms between ions and solids are summarized and related to materials processing by ion sources. The applicability of ion-beam techniques in the controlled modification of surfaces is discussed and critically compared with wet-chemical etching procedures. Masking areas of a sample surface and, thus, protecting the surface below the mask from ion bombardment, is the basis of structuring surfaces by ion-beam etching. On the microscale and nanoscale, masks as structured coatings are typically generated by lithographic methods such as photolithography and electron-beam lithography.
Examples will be given, how ion-beam technology can unfold its potential in modifying surface topography by means of broad-beam bombardment with positively charged ions. Herein, we will focus on the transfer of the extraction grid pattern into primary and secondary beam.

Category of your contribution Beam formation, extraction, transport, and diagnostics

Primary authors

Dr Martin Becker (Institute of Experimental Physics, Heinrich-Buff-Ring 16, Justus Liebig University Giessen, D-35392 Giessen, Germany) Mr Xingda Li (Institute of Experimental Physics, Heinrich-Buff-Ring 16, Justus Liebig University Giessen, D-35392 Giessen, Germany) Dr Torsten Henning (Institute of Experimental Physics, Heinrich-Buff-Ring 16, Justus Liebig University Giessen, D-35392 Giessen, Germany) Prof. Peter Klar (Institute of Experimental Physics, Heinrich-Buff-Ring 16, Justus Liebig University Giessen, D-35392 Giessen, Germany)

Presentation Materials

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